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出版地址：A V S AMER INST PHYSICS , STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
期刊简介：Journal of Vacuum Science & Technology B《真空科学与技术杂志B》（双月刊）. In 1983, the two journals, Journal of Vacuum Science and Technology A and B were launched when the original Journal of Vacuum Science and Technology was split. JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.
